Evaporation source
씨앤아이테크놀로지는 OLED system과 더불어 evaporation source도 개발하고 있습니다. 물질, 사용온도, 용량 등에 적합한 evaporation source를 제공해드립니다.
| CES-LT series | CES-HT series | CES-CLS series | |
|---|---|---|---|
| Mvaterials | Organic materials | Mg, Ag, LiF, Au | Al |
| 3D drawing |
|
|
|
| Capacity (cc) | 3 ~ 200 | 10 ~ 200 | 10 ~ 350 |
| Operation temperature | Max. 500 ℃ | Max. 1400 ℃ | Max. 1400 ℃ |
| Outgassing temperature | Max. 600 ℃ | Max. 1500 ℃ | Max. 1500 ℃ |
| Heater material | Ta | Ta | Ta |
| Thermocouple | K-type | C-type | C-type |
| Reflector type | Multi reflector | Multi reflector | Multi reflector |
| Cooling type | option | Cooling jacket | Cooling jacket |
| Crucible material | Al2O3, PBN, Ti | PBN | Inner : PBN, AlN / Outer : PBN |
| Flange | O-ring or CF flange | O-ring or CF flange | O-ring or CF flange |
| Flange material | SUS304 | SUS304 | SUS304 |