ShieldRus-1200
ShieldRus-1200 장비는 반도체 package에 sputtering 방식을 이용 하여 전자파 차폐공정을 하는 장치로, 양산 시스템에 특화되어 있습니다.
주요 특징
- Cubicle in-line 방식으로 Compact layout 구성
- 고속 생산 능력 확보
- Easy maintenance
- Ultra low sputtering temp
| Item | ShieldRus-1200 | ShieldRus-1200s | ShieldRus-300H |
|---|---|---|---|
| 3D drawing |
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| Tact Time | 6 min(3.5 um at top) | 6 min(3.5 um at top) | 30 min(3.5 um at top) |
| Cooling Type | Active cooling | Active cooling | Active cooling |
| Temperature | < 120℃ (with MF-Seal & Pi tape) | < 120℃ (with MF-Seal & Pi tape) | < 120℃ (with MF-Seal & Pi tape) |
| PKG Handling Material | PI tape and MF-Seal | PI tape and MF-Seal | PI tape and MF-Seal |
| UPH | Ø300 Standard ring frame 40ea | Ø300 Standard ring frame 10ea | Ø300 Standard ring frame 2ea |
